Vacuum Pump Solutions for the Semiconductor Industry

Vacuum Pump Solutions for the Semiconductor Industry

In the semiconductor industry – where ultra-clean environments and extreme precision are essential – vacuum pump play a vital role in nearly every critical process, including plasma etching, thin-film deposition (PVD/CVD), wafer inspection, packaging, and cleaning.

Key Applications of Vacuum Pump in Semiconductor Manufacturing:

  • Plasma Etching: Requires stable vacuum levels to create microscopic patterns on wafer surfaces.

  • Thin Film Deposition (PVD/CVD): Demands high-vacuum environments to ensure coating quality and precise material layering.

  • Wafer Inspection & Packaging: Vacuum pumps remove contaminants like dust and moisture to maintain absolute cleanliness during chip production.

Why Choose Atlas Copco Vacuum Pump?

  • High performance & durability: Engineered for the demanding environments of semiconductor plants.

  • Energy-efficient design: Helps reduce operational costs in continuous production lines.

  • Reliable & consistent: Minimizes downtime and risk of contamination.

  • Easy integration & maintenance: Seamlessly fits into modern semiconductor manufacturing systems.

Trusted Solution for Microchip, Semiconductor & Electronics Production

Atlas Copco offers advanced vacuum pump technologies that meet the most stringent requirements for cleanliness, pumping speed, and stability throughout the entire semiconductor manufacturing process – from wafer fabrication to final assembly.


📌 Official Distributor of Atlas Copco Vacuum Pumps in Vietnam
TAN LONG TECHNOLOGY SOLUTIONS CO., LTD – The authorized distributor of Atlas Copco (Belgium) in Vietnam.
We provide genuine products with full CO-CQ certification, along with professional consulting, installation, and maintenance services.

📍 Address: 146/18 Nguyen Huu Tho, Nha Be District, Ho Chi Minh City
📞 Hotline: 0909 09 1789
📧 Email: sales@tanlongvietnam.com
🌐 Website: www.tanlongvietnam.com

0909091789